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Confirm exhausting Tip and find Crack with naked eyes to check vacuum state.
If there is problem replace the module .
⇒ in case of vacuum breakdown, module makes a shaking noise because of inside gas ventilation.
(there may be a small crack which could not see with naked eyes. And this noise is different from Capacitor noise. )
2. Exhaust tip Crack
CRACKEDNORMAL
4. Trouble shooting.
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